Aviza 8M Class 10 Clean Room

This clean room was built to accommodate Aviza’s 11’-0” tools. The ceiling is at 12’ A.F.F. and the deck above is at 13’-9”. Due to only having 1’-9” above the ceiling, we built a plenum and used individual fan powered HEPAS on the ceiling with pre-filters mounted in the walls along the gray side of the clean room.